Array-based optical nanolithography using optically trapped microlenses
نویسندگان
چکیده
منابع مشابه
Array-based optical nanolithography using optically trapped microlenses.
Current demands on optical nanolithography require the ability to rapidly and cost-effectively write arbitrary patterns over large areas with sub-diffraction limit feature sizes. The challenge in accomplishing this with arrays of near-field probes is maintaining equal separations between the substrate and each probe, even over non-planar substrates. Here we demonstrate array-based laser nanolit...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2009
ISSN: 1094-4087
DOI: 10.1364/oe.17.003640